Mass-detection based in-plane resonant nano-electro-mechanical sensors

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Authors
Hassani, Faezeh Arab; Dupre, Cecilia; Ollier, Eric; Cobianu, Cornel; Armini, Silvia; Cherman, Vladimir; Ionescu, Adrian Mihai; Tsuchiya, Yoshishige; Mizuta, Hiroshi
Conference
Japan Society of Applied Physics (JSAP) Annual Meeting
Title
Mass-detection based in-plane resonant nano-electro-mechanical sensors
Publication type
Oral presentation
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