Authors

Heyne, Markus; Zhang, Liping; de Marneffe, Jean-Francois; Gronheid, Roel; Wilson, Chris; Baklanov, Mikhaïl

Conference

AVS 60th International Symposium & Exhibition

Title

Mitigation of plasma-induced damage of advanced 2.0 porous dielectrics by the pore stuffing approach

Publication type

Meeting abstract