PDMS selective bonding for the fabrication of biocompatible all polymer NC microvalves

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Authors

Jahanshahi, Amir; Salvo, Pietro; Vanfleteren, Jan

ISSN

1057-7157

Issue

6

Journal

Journal of Microelectromechanical Systems

Volume

22

Title

PDMS selective bonding for the fabrication of biocompatible all polymer NC microvalves

Publication type

Journal article

Embargo date

9999-12-31

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