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PDMS selective bonding for the fabrication of biocompatible all polymer NC microvalves

dc.contributor.authorJahanshahi, Amir
dc.contributor.authorSalvo, Pietro
dc.contributor.authorVanfleteren, Jan
dc.date.accessioned2021-10-21T08:31:13Z
dc.date.available2021-10-21T08:31:13Z
dc.date.issued2013
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22538
dc.sourceIIOimport
dc.titlePDMS selective bonding for the fabrication of biocompatible all polymer NC microvalves
dc.typeJournal article
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1354
dc.source.endpage1360
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue6
dc.source.volume22
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6549182
imec.availabilityPublished - open access


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