Show simple item record

Considerations for further scaling of metal–insulator–metal DRAM capacitors

dc.contributor.authorKaczer, Ben
dc.contributor.authorClima, Sergiu
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorKim, Min-Soo
dc.contributor.authorSwerts, Johan
dc.contributor.authorWang, W. C.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorVerhulst, Anne
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-21T08:39:10Z
dc.date.available2021-10-21T08:39:10Z
dc.date.issued2013
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22563
dc.sourceIIOimport
dc.titleConsiderations for further scaling of metal–insulator–metal DRAM capacitors
dc.typeJournal article
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecGovoreanu, Bogdan::0000-0001-7210-2979
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.source.peerreviewyes
dc.source.beginpage01A105
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume31
dc.identifier.urlhttp://dx.doi.org/10.1116/1.4767125
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record