Considerations for further scaling of metal–insulator–metal DRAM capacitors

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Author(s)

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Tomida, Kazuyuki

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Govoreanu, Bogdan

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Popovici, Mihaela Ioana

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Afanasiev, Valeri

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Pourtois, Geoffrey

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Groeseneken, Guido

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Journal

Journal of Vacuum Science and Technology B

Metrics

1915 since deposited on 2021-10-21

Acq. date: 2025-10-23