Publication:

Considerations for further scaling of metal–insulator–metal DRAM capacitors

Date

2013
Journal article
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Author(s)

Kaczer, Ben  
;
Clima, Sergiu  
;
Tomida, Kazuyuki  
;
Govoreanu, Bogdan  
;
Popovici, Mihaela Ioana  
;
Kim, Min-Soo  
;
Swerts, Johan  
;
Wang, W. C.
;
Afanasiev, Valeri  
;
Verhulst, Anne  
;
Pourtois, Geoffrey  
;
Groeseneken, Guido  
;
Jurczak, Gosia  

Journal

Journal of Vacuum Science and Technology B

Abstract

Description

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1917 since deposited on 2021-10-21
Acq. date: 2026-01-25

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1917 since deposited on 2021-10-21
Acq. date: 2026-01-25

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