High-k / metal Gate 3 (TDDB)
| dc.contributor.author | Kauerauf, Thomas | |
| dc.date.accessioned | 2021-10-21T08:40:55Z | |
| dc.date.available | 2021-10-21T08:40:55Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22569 | |
| dc.source | IIOimport | |
| dc.title | High-k / metal Gate 3 (TDDB) | |
| dc.type | Oral presentation | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
| dc.source.conferencedate | 14/04/2013 | |
| dc.source.conferencelocation | Monterey, CA USA | |
| imec.availability | Published - open access | |
| imec.internalnotes | Tutorial |