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Reliability of MOL local interconnects

dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBranka, Anna
dc.contributor.authorSorrentino, Beppo
dc.contributor.authorRoussel, Philippe
dc.contributor.authorDemuynck, Steven
dc.contributor.authorCroes, Kristof
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-21T08:41:36Z
dc.date.available2021-10-21T08:41:36Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22571
dc.sourceIIOimport
dc.titleReliability of MOL local interconnects
dc.typeProceedings paper
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2F.5
dc.source.conferenceIEEE International Reliability Physics Conference - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access


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