New mechanism for oxidation of native silicon oxide

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Authors

Khalilov, Umedjon; Pourtois, Geoffrey; Huygh, Stijn; van Duin, A.C.T.; Neyts, E.C.; Bogaerts, Annemie

ISSN

1932-7447

Issue

19

Journal

Journal of Physical Chemistry C

Volume

117

Title

New mechanism for oxidation of native silicon oxide

Publication type

Journal article

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