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New mechanism for oxidation of native silicon oxide

dc.contributor.authorKhalilov, Umedjon
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorHuygh, Stijn
dc.contributor.authorvan Duin, A.C.T.
dc.contributor.authorNeyts, E.C.
dc.contributor.authorBogaerts, Annemie
dc.date.accessioned2021-10-21T08:49:47Z
dc.date.available2021-10-21T08:49:47Z
dc.date.issued2013
dc.identifier.issn1932-7447
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22595
dc.sourceIIOimport
dc.titleNew mechanism for oxidation of native silicon oxide
dc.typeJournal article
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewyes
dc.source.beginpage9819
dc.source.endpage9825
dc.source.journalJournal of Physical Chemistry C
dc.source.issue19
dc.source.volume117
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/jp400433u
imec.availabilityPublished - imec


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