New mechanism for oxidation of native silicon oxide
dc.contributor.author | Khalilov, Umedjon | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Huygh, Stijn | |
dc.contributor.author | van Duin, A.C.T. | |
dc.contributor.author | Neyts, E.C. | |
dc.contributor.author | Bogaerts, Annemie | |
dc.date.accessioned | 2021-10-21T08:49:47Z | |
dc.date.available | 2021-10-21T08:49:47Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 1932-7447 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22595 | |
dc.source | IIOimport | |
dc.title | New mechanism for oxidation of native silicon oxide | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 9819 | |
dc.source.endpage | 9825 | |
dc.source.journal | Journal of Physical Chemistry C | |
dc.source.issue | 19 | |
dc.source.volume | 117 | |
dc.identifier.url | http://pubs.acs.org/doi/abs/10.1021/jp400433u | |
imec.availability | Published - imec |
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