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Ni Oxidation study for 3D Interconnect Application

dc.contributor.authorKim, Tae-Gon
dc.contributor.authorGuerrieri, Stefano
dc.date.accessioned2021-10-21T08:52:21Z
dc.date.available2021-10-21T08:52:21Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22603
dc.sourceIIOimport
dc.titleNi Oxidation study for 3D Interconnect Application
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceThe 6th International Conference on Spectroscopic Ellipsometry (ICSE-VI)
dc.source.conferencedate26/05/2013
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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