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Characterization of metal permeation in porous low-k films by spectroscopic ellipsometry

dc.contributor.authorKim, Tae-Gon
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T08:52:40Z
dc.date.available2021-10-21T08:52:40Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22604
dc.sourceIIOimport
dc.titleCharacterization of metal permeation in porous low-k films by spectroscopic ellipsometry
dc.typeMeeting abstract
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.conference6th International Conference on Spectroscopy Ellipsometry - ICSE-VI
dc.source.conferencedate26/05/2013
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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