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Application of atom probe tomography to epitaxial layers

dc.contributor.authorKumar, Arul
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorGencarelli, Federica
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T08:59:17Z
dc.date.available2021-10-21T08:59:17Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22623
dc.sourceIIOimport
dc.titleApplication of atom probe tomography to epitaxial layers
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage79
dc.source.endpage80
dc.source.conference8th International Conference on Silicon Epitaxy and Heterostructures - ICSI-8
dc.source.conferencedate2/06/2013
dc.source.conferencelocationFukuoka Japan
imec.availabilityPublished - open access


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