Surface preparation and cleaning in back-end-of-line for advanced CMOS integrated circuit

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Authors
Le, Quoc Toan; Kesters, Els; Vereecke, Guy; Holsteyns, Frank; De Gendt, Stefan
Conference
International Workshop on Nanotechnology and Application
Title
Surface preparation and cleaning in back-end-of-line for advanced CMOS integrated circuit
Publication type
Meeting abstract
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