dc.contributor.author | Lee, Jae Woo | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Cho, Moon Ju | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | Boccardi, Guillaume | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Thean, Aaron | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-21T09:11:09Z | |
dc.date.available | 2021-10-21T09:11:09Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 0018-9383 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22660 | |
dc.source | IIOimport | |
dc.title | Low frequency noise analysis for post-treatment of replacement metal gate FinFET | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | Boccardi, Guillaume | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Boccardi, Guillaume::0000-0003-3226-4572 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2960 | |
dc.source.endpage | 2962 | |
dc.source.journal | IEEE Transactions on Electron Devices | |
dc.source.issue | 9 | |
dc.source.volume | 60 | |
imec.availability | Published - imec | |