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Low frequency noise analysis for post-treatment of replacement metal gate FinFET
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Authors
Lee, Jae Woo
;
Simoen, Eddy
;
Veloso, Anabela
;
Cho, Moon Ju
;
Arimura, Hiroaki
;
Boccardi, Guillaume
;
Ragnarsson, Lars-Ake
;
Chiarella, Thomas
;
Horiguchi, Naoto
;
Thean, Aaron
;
Groeseneken, Guido
ISSN
0018-9383
Issue
9
Journal
IEEE Transactions on Electron Devices
Volume
60
Title
Low frequency noise analysis for post-treatment of replacement metal gate FinFET
Publication type
Journal article
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