| dc.contributor.author | Leonov, Vladimir | |
| dc.date.accessioned | 2021-10-21T09:13:32Z | |
| dc.date.available | 2021-10-21T09:13:32Z | |
| dc.date.issued | 2013-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22667 | |
| dc.source | IIOimport | |
| dc.title | MEMS at Imec for industrial, biomedical and life sciences applications | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Leonov, Vladimir | |
| dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | paper #1 | |
| dc.source.conference | Proceedings of the 3rd International MEMS Forum | |
| dc.source.conferencedate | 25/06/2013 | |
| dc.source.conferencelocation | St. Petersburg Russia | |
| imec.availability | Published - imec | |
