dc.contributor.author | Vanhaelemeersch, Serge | |
dc.contributor.author | Van den hove, Luc | |
dc.contributor.author | Lee, Hean-Cheal | |
dc.date.accessioned | 2021-09-30T09:57:50Z | |
dc.date.available | 2021-09-30T09:57:50Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2268 | |
dc.source | IIOimport | |
dc.title | The etching behavior of tungsten (w) with respect to the orientation of the grain boudnary and masking layers | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
dc.contributor.imecauthor | Van den hove, Luc | |
dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
dc.source.peerreview | no | |
dc.source.conference | Materials Research Society 1997 Spring Meeting : Symposium on Multilevel Metal Process Integration; April 1-2, 1997; San Francis | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |