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Implantation and activation of phosphorus in amorphous and crystalline germanium layers

dc.contributor.authorLieten, Ruben
dc.contributor.authorDouhard, Bastien
dc.contributor.authorStesmans, Andre
dc.contributor.authorJivanescu, M
dc.contributor.authorBeeman, J.W.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHaller, Eugene
dc.contributor.authorLocquet, Jean-Pierre
dc.date.accessioned2021-10-21T09:23:37Z
dc.date.available2021-10-21T09:23:37Z
dc.date.issued2013
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22695
dc.sourceIIOimport
dc.titleImplantation and activation of phosphorus in amorphous and crystalline germanium layers
dc.typeJournal article
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewyes
dc.source.beginpageP346
dc.source.endpageP350
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue9
dc.source.volume2
dc.identifier.urlhttp://dx.doi.org/10.1149/2.011309jss
imec.availabilityPublished - imec


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