Implantation and activation of phosphorus in amorphous and crystalline germanium layers

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Authors

Lieten, Ruben; Douhard, Bastien; Stesmans, Andre; Jivanescu, M; Beeman, J.W.; Simoen, Eddy; Vandervorst, Wilfried; Haller, Eugene; Locquet, Jean-Pierre

ISSN

2162-8769

Issue

9

Journal

ECS Journal of Solid State Science and Technology

Volume

2

Title

Implantation and activation of phosphorus in amorphous and crystalline germanium layers

Publication type

Journal article

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