Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Implantation and activation of phosphorus in amorphous and crystalline germanium layers
Publication:
Implantation and activation of phosphorus in amorphous and crystalline germanium layers
Copy permalink
Date
2013
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lieten, Ruben
;
Douhard, Bastien
;
Stesmans, Andre
;
Jivanescu, M
;
Beeman, J.W.
;
Simoen, Eddy
;
Vandervorst, Wilfried
;
Haller, Eugene
;
Locquet, Jean-Pierre
Journal
ECS Journal of Solid State Science and Technology
Abstract
Description
Metrics
Views
1869
since deposited on 2021-10-21
Acq. date: 2025-12-09
Citations
Metrics
Views
1869
since deposited on 2021-10-21
Acq. date: 2025-12-09
Citations