Implantation and activation of phosphorus in amorphous and crystalline germanium layers

dc.contributor.author	Lieten, Ruben
dc.contributor.author	Douhard, Bastien
dc.contributor.author	Stesmans, Andre
dc.contributor.author	Jivanescu, M
dc.contributor.author	Beeman, J.W.
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Haller, Eugene
dc.contributor.author	Locquet, Jean-Pierre
dc.contributor.imecauthor	Lieten, Ruben
dc.contributor.imecauthor	Douhard, Bastien
dc.contributor.imecauthor	Stesmans, Andre
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-21T09:23:37Z
dc.date.available	2021-10-21T09:23:37Z
dc.date.issued	2013
dc.identifier.issn	2162-8769
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22695
dc.identifier.url	http://dx.doi.org/10.1149/2.011309jss
dc.source.beginpage	P346
dc.source.endpage	P350
dc.source.issue	9
dc.source.journal	ECS Journal of Solid State Science and Technology
dc.source.volume	2
dc.title	Implantation and activation of phosphorus in amorphous and crystalline germanium layers
dc.type	Journal article
dspace.entity.type	Publication
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