dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Chen, Shih-Hung | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-21T09:27:09Z | |
dc.date.available | 2021-10-21T09:27:09Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22705 | |
dc.source | IIOimport | |
dc.title | ESD in FinFET technologies: past learning and emerging challenges | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Chen, Shih-Hung | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2B.5 | |
dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 14/04/2013 | |
dc.source.conferencelocation | Monterey, CA USA | |
imec.availability | Published - open access | |