High-k gadolinium and aluminum scandates for hybrid floating gate NAND flash

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Authors
Lisoni, Judit; Breuil, Laurent; Nyns, Laura; Blomme, Pieter; Van den Bosch, Geert; Van Houdt, Jan
Conference
18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts
Title
High-k gadolinium and aluminum scandates for hybrid floating gate NAND flash
Publication type
Meeting abstract
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