Authors

Maestre Caro, Arantxa; Travaly, Youssef; Beyer, Gerald; Tokei, Zsolt; Maes, Guido; Borghs, Gustaaf; Armini, Silvia

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

106

Title

Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene vias

Publication type

Journal article

Embargo date

9999-12-31