Show simple item record

Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces

dc.contributor.authorMatovu, John Bogere
dc.contributor.authorOng, Patrick
dc.contributor.authorKrishnan, Sitaraman
dc.contributor.authorBabu, S.V.
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-21T09:57:08Z
dc.date.available2021-10-21T09:57:08Z
dc.date.issued2013
dc.identifier.issn0888-5885
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22787
dc.sourceIIOimport
dc.titleUse of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces
dc.typeJournal article
dc.contributor.imecauthorOng, Patrick
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.source.peerreviewyes
dc.source.beginpage10664
dc.source.endpage10672
dc.source.journalIndustrial and Engineering Chemistry Research
dc.source.issue31
dc.source.volume52
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record