Authors

Matovu, John Bogere; Ong, Patrick; Krishnan, Sitaraman; Babu, S.V.; Leunissen, Peter

ISSN

0888-5885

Issue

31

Journal

Industrial and Engineering Chemistry Research

Volume

52

Title

Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces

Publication type

Journal article