Publication:
Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces
Date
| dc.contributor.author | Matovu, John Bogere | |
| dc.contributor.author | Ong, Patrick | |
| dc.contributor.author | Krishnan, Sitaraman | |
| dc.contributor.author | Babu, S.V. | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.imecauthor | Ong, Patrick | |
| dc.contributor.orcidimec | Ong, Patrick::0000-0002-2072-292X | |
| dc.date.accessioned | 2021-10-21T09:57:08Z | |
| dc.date.available | 2021-10-21T09:57:08Z | |
| dc.date.issued | 2013 | |
| dc.identifier.issn | 0888-5885 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22787 | |
| dc.source.beginpage | 10664 | |
| dc.source.endpage | 10672 | |
| dc.source.issue | 31 | |
| dc.source.journal | Industrial and Engineering Chemistry Research | |
| dc.source.volume | 52 | |
| dc.title | Use of multifunctional carboxylic acids and hydrogen peroxide to improve surface quality and minimize phosphine evolution during chemical mechanical polishing of indium phosphide surfaces | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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