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Patterning aspects of SiGe/Ge BFFT fabrication

dc.contributor.authorMilenin, Alexey
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDemand, Marc
dc.date.accessioned2021-10-21T10:05:09Z
dc.date.available2021-10-21T10:05:09Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22807
dc.sourceIIOimport
dc.titlePatterning aspects of SiGe/Ge BFFT fabrication
dc.typeProceedings paper
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDemand, Marc
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3
dc.source.endpage9
dc.source.conferencePlasma Processing
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttp://ecst.ecsdl.org/content/50/46/3.full.pdf+html?sid=b3b2fa71-a9da-4824-8d34-ab23068db0f1
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 50, Issue 46


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