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Ultra-thin multi-axial shear stress sensor based on a segmented photodiode

dc.contributor.authorMissinne, Jeroen
dc.contributor.authorKostov, Plamen
dc.contributor.authorVan Hoe, Bram
dc.contributor.authorBosman, Erwin
dc.contributor.authorGaberl, Wolfgang
dc.contributor.authorZimmermann, Horst
dc.contributor.authorVan Steenberge, Geert
dc.date.accessioned2021-10-21T10:06:45Z
dc.date.available2021-10-21T10:06:45Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22811
dc.sourceIIOimport
dc.titleUltra-thin multi-axial shear stress sensor based on a segmented photodiode
dc.typeProceedings paper
dc.contributor.imecauthorMissinne, Jeroen
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.orcidimecMissinne, Jeroen::0000-0002-3470-620X
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceIEEE Photonics Conference - IPC
dc.source.conferencedate9/09/2013
dc.source.conferencelocationBellevue USA
imec.availabilityPublished - open access


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