Generation rate analysis of different S/D junction engineering in scalted UTBOX 1-T DRAM

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Authors
Nicoletti, Talitha; Sasaki, Katia R.A.; dos Santos, Sara D.; Martino, Jao Antonio; Aoulaiche, Marc; Simoen, Eddy; Claeys, Cor
Conference
Advanced Semiconductor-on-Isolator Technology and Related Physics 16
Title
Generation rate analysis of different S/D junction engineering in scalted UTBOX 1-T DRAM
Publication type
Proceedings paper
Embargo date
9999-12-31
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