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Atomic layer deposition of scandium-based oxides

dc.contributor.authorNyns, Laura
dc.contributor.authorLisoni, Judit
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-21T10:31:06Z
dc.date.available2021-10-21T10:31:06Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22872
dc.sourceIIOimport
dc.titleAtomic layer deposition of scandium-based oxides
dc.typeMeeting abstract
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewno
dc.source.beginpageN.IV 4
dc.source.conferenceE-MRS 2013 Spring Meeting
dc.source.conferencedate27/05/2013
dc.source.conferencelocationStrasbourg France
dc.identifier.urlhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=209&day=2013-05-28&year=2013&Itemid=99999999&id_season
imec.availabilityPublished - imec


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