Atomic layer deposition of scandium-based oxides

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Authors
Nyns, Laura; Lisoni, Judit; Van den Bosch, Geert; Van Elshocht, Sven; Van Houdt, Jan
Conference
9th International Nanotechnology Conference on Communication and Cooperation - INC9
Title
Atomic layer deposition of scandium-based oxides
Publication type
Oral presentation
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