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Stress induced defect generation implications of doping HfO2 with Al
Publication:
Stress induced defect generation implications of doping HfO2 with Al
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Date
2013
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
O'Connor, Robert
;
Kauerauf, Thomas
;
Arimura, Hiroaki
;
Ragnarsson, Lars-Ake
Journal
Microelectronic Engineering
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1900
since deposited on 2021-10-21
Acq. date: 2025-12-10
Citations
Metrics
Views
1900
since deposited on 2021-10-21
Acq. date: 2025-12-10
Citations