Stress induced defect generation implications of doping HfO2 with Al

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Authors
O'Connor, Robert; Kauerauf, Thomas; Arimura, Hiroaki; Ragnarsson, Lars-Ake
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
109
Title
Stress induced defect generation implications of doping HfO2 with Al
Publication type
Journal article
Embargo date
9999-12-31
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