dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.date.accessioned | 2021-10-21T10:33:21Z | |
dc.date.available | 2021-10-21T10:33:21Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22878 | |
dc.source | IIOimport | |
dc.title | Stress induced defect generation implications of doping HfO2 with Al | |
dc.type | Journal article | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 54 | |
dc.source.endpage | 56 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 109 | |
dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0167931713003511 | |
imec.availability | Published - open access | |
imec.internalnotes | INOS 2013 paper | |