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A study of nanoparticle removal on patterned surfaces

dc.contributor.authorPacco, Antoine
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-21T10:41:00Z
dc.date.available2021-10-21T10:41:00Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22897
dc.sourceIIOimport
dc.titleA study of nanoparticle removal on patterned surfaces
dc.typeProceedings paper
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage17
dc.source.endpage23
dc.source.conferenceSemiconductor Cleaning Science and Technology 13
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol. 58, Issue 6


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