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Selective chemical vapour synthesis of Cu3Ge: process optimisation and film properties

dc.contributor.authorPeter, Antony
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSchaekers, Marc
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-21T10:51:40Z
dc.date.available2021-10-21T10:51:40Z
dc.date.issued2013
dc.identifier.issn0966-9795
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22922
dc.sourceIIOimport
dc.titleSelective chemical vapour synthesis of Cu3Ge: process optimisation and film properties
dc.typeJournal article
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage35
dc.source.endpage42
dc.source.journalIntermetallics
dc.source.volume34
imec.availabilityPublished - imec


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