Selective chemical vapour synthesis of Cu3Ge: process optimisation and film properties

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Authors
Peter, Antony; Carbonell, Laure; Schaekers, Marc; Adelmann, Christoph; Meersschaut, Johan; Franquet, Alexis; Richard, Olivier; Bender, Hugo; Tokei, Zsolt; Van Elshocht, Sven
ISSN
0966-9795
Journal
Intermetallics
Volume
34
Title
Selective chemical vapour synthesis of Cu3Ge: process optimisation and film properties
Publication type
Journal article
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