Publication:

Selective chemical vapour synthesis of Cu3Ge: process optimisation and film properties

Date

2013
Journal article
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dc.contributor.authorPeter, Antony
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSchaekers, Marc
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-21T10:51:40Z
dc.date.available2021-10-21T10:51:40Z
dc.date.issued2013
dc.identifier.issn0966-9795
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22922
dc.source.beginpage35
dc.source.endpage42
dc.source.journalIntermetallics
dc.source.volume34
dc.title

Selective chemical vapour synthesis of Cu3Ge: process optimisation and film properties

dc.typeJournal article
dspace.entity.typePublication
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