Roughness evolution during the atomic layer deposition of metal oxides

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Authors

Peter, Antony; Delabie, Annelies; Rodriguez, Leonard; Moussa, Alain; Adelmann, Christoph

ISSN

0734-2101

Issue

31

Journal

Journal of Vacuum Science and Technology A

Volume

6

Title

Roughness evolution during the atomic layer deposition of metal oxides

Publication type

Journal article

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