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Low temperature catalytic chemical vapour synthesis of Cu3Ge thin films for interconnect applications

dc.contributor.authorPeter, Antony
dc.contributor.authorWen, Liang Gong
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-21T10:53:00Z
dc.date.available2021-10-21T10:53:00Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22925
dc.sourceIIOimport
dc.titleLow temperature catalytic chemical vapour synthesis of Cu3Ge thin films for interconnect applications
dc.typeMeeting abstract
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage115
dc.source.endpage116
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate10/03/2013
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access
imec.internalnotesP4-09


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