High performance thermally cured low-k dielectrics for ILDs
dc.contributor.author | Phillips, M. | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Nemanich, R. | |
dc.date.accessioned | 2021-10-21T10:57:12Z | |
dc.date.available | 2021-10-21T10:57:12Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22935 | |
dc.source | IIOimport | |
dc.title | High performance thermally cured low-k dielectrics for ILDs | |
dc.type | Meeting abstract | |
dc.source.peerreview | no | |
dc.source.beginpage | AA3.01 | |
dc.source.conference | MRS Spring Meeting Symposium AA | |
dc.source.conferencedate | 1/04/2013 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec |
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