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High performance thermally cured low-k dielectrics for ILDs

dc.contributor.authorPhillips, M.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorNemanich, R.
dc.date.accessioned2021-10-21T10:57:12Z
dc.date.available2021-10-21T10:57:12Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22935
dc.sourceIIOimport
dc.titleHigh performance thermally cured low-k dielectrics for ILDs
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpageAA3.01
dc.source.conferenceMRS Spring Meeting Symposium AA
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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