1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures

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Authors
Proshina, Olga; Rakhimova, Tatyana; Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Publication type
Meeting abstract
Embargo date
9999-12-31
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