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Investigation of the correlation between parameters defining the state of sputtered particles

dc.contributor.authorVlekken, J.
dc.contributor.authorCroes, Kris
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorKnuyt, G.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Schepper, Patrick
dc.date.accessioned2021-09-30T10:04:22Z
dc.date.available2021-09-30T10:04:22Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2295
dc.sourceIIOimport
dc.titleInvestigation of the correlation between parameters defining the state of sputtered particles
dc.typeOral presentation
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceSIMS XI; 8-12 September 1997; Orlando, Fl., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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