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A novel environmentally-friendly corrosion-free post-stripping rinsing procedure after solvent strip

dc.contributor.authorVos, Rita
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorMertens, Paul
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T10:04:52Z
dc.date.available2021-09-30T10:04:52Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2297
dc.sourceIIOimport
dc.titleA novel environmentally-friendly corrosion-free post-stripping rinsing procedure after solvent strip
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewyes
dc.source.beginpage37
dc.source.endpage38
dc.source.conferenceSymposium on VLSI Technology: Digest of Technical Papers
dc.source.conferencedate10/06/1997
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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