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Ultra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometers

dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorTilmans, Harrie
dc.contributor.authorFrancis, Laurent
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-21T11:18:49Z
dc.date.available2021-10-21T11:18:49Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22984
dc.sourceIIOimport
dc.titleUltra-narrow, high aspect ratio trenches for use in miniaturized poly-SiGe accelerometers
dc.typeMeeting abstract
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage2646
dc.source.conference224th Electrochemical Society Meeting Fall Meeting
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. 2013-02


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