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Defect source analysis of directed self-assembly process (DSA of DSA)

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorHarukawa, Ryota
dc.contributor.authorSuri, Mayur
dc.contributor.authorDurant, Stephane
dc.contributor.authorCross, Andrew
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T11:24:31Z
dc.date.available2021-10-21T11:24:31Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22997
dc.sourceIIOimport
dc.titleDefect source analysis of directed self-assembly process (DSA of DSA)
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewno
dc.source.beginpage86800L
dc.source.conferenceAlternative Lithographic Technologies V
dc.source.conferencedate24/02/2013
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 8680


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