Origin of defect in directed self-assembly of block copolymers using feature multiplication

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Authors
Rincon Delgadillo, Paulina; Harukawa, Ryoto; Parnell, Doni; Lee, Yu-tsung; Chan, BT; Lin, Guanyang; Cao, Yi; Nagaswami, Venkat; Somervell, Mark; Nafus, Kathleen; Gronheid, Roel; Nealey, Paul
Conference
IEEE Litho Workshop
Title
Origin of defect in directed self-assembly of block copolymers using feature multiplication
Publication type
Proceedings paper
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