Show simple item record

Defect source analysis of directed self-assembly process

dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorSuri, Mayur
dc.contributor.authorDurant, Stephane
dc.contributor.authorCross, Andrew
dc.contributor.authorNagaswami, Venkat
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-21T11:25:28Z
dc.date.available2021-10-21T11:25:28Z
dc.date.issued2013
dc.identifier.issn1537-1646
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22999
dc.sourceIIOimport
dc.titleDefect source analysis of directed self-assembly process
dc.typeJournal article
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage31112
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.issue3
dc.source.volume12
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record